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Cleanroom laboratory - Welcome to the cleanest place at the university

For work and experiments that require a particle-free environment, the university operates a cleanroom laboratory that is used for teaching and research. The Central Cleanroom Laboratory (CCL) at 91²Ö¿â Bergakademie Freiberg is located in a side wing of the Gellert Building, which houses the physics institutes.

Kontakt

What is a cleanroom?

Research topics

Contact and directions

Equipment

There are numerous technologies available for the production of microelectronic components.

Wafer is placed in exposure system
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Structuring

Lithography and nano-plotter
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Sputtering system in the clean room laboratory
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Deposition processes

Chemical and physical deposition, atomic layer deposition
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Wet chemistry bench in the clean room laboratory
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Wet chemistry

Chemistry laboratory for semiconductor components
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RTP oven with open flap and glowing interior
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Thermal processing

Annealing under different atmospheres
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Plasma etching system in the clean room laboratory
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Plasma etching

Etching without acid bottle
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Four-point measuring station with PC in the clean room laboratory
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Measuring devices + glove box

Characterisation of layers and structures
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Exhaust gas combustion system with combustion cell and pipes
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Operating technology

Building services for supply and exhaust gas cleaning
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Drone image of the cleanroom building
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Tour

Our devices presented one after the other
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